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Which consequence results when a MOSFET's gate oxide layer dopants contaminate single crystal silicon source lattice?

A)Subthreshold leakage current increases sharply
B)Thermal runaway becomes much more likely
C)Gate capacitance value plateaus unexpectedly
D)Reverse recovery time decreases significantly

💡 Explanation

Increased subthreshold leakage occurs because dopant migration causes localized disruptions to the crystal lattice. This lowers transistor threshold voltage because of increased surface states; therefore more devices conduct at incorrect levels, rather than thermal runaway.

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