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← ScienceWhich consequence when imperfections disrupt coherence within microchip lithography?
A)Reduced feature resolution on the wafer✓
B)Increased photoresist layer uniformity achieved
C)Enhanced diffraction at mask edges seen
D)Lower energy consumption during wafer exposure
💡 Explanation
Reduced feature resolution arises because disrupted coherence degrades the projection of the mask pattern onto the wafer via the **loss of constructive interference**. Therefore, resolution drops, rather than uniformity improving, because incoherent light scatters rather than focusing properly.
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