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Which effect impairs efficient data readout when fabricating integrated optical circuits using deep ultraviolet (DUV) photolithography?

A)Speckle from limited laser coherence
B)Spherical aberration from lens imperfections
C)Chromatic dispersion broadens pulse width
D)Polarization dependent loss varies grating

💡 Explanation

Speckle reduces pattern fidelity because the limited spatial and temporal coherence of the DUV laser source creates interference patterns that degrade feature resolution. Therefore, speckle noise increases, rather than being caused by other parameters under ideal, higher coherence, conditions.

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