Which outcome jeopardizes the writing precision of an EUV lithography system?

💡 Explanation

Reduced beam coherence smears the projected mask image because the **interference** fringes become indistinct, therefore line edge roughness increases, rather than achieving crisp lines; stochastic photon arrival contributes noise but isn't primary.

• Which outcome occurs when gravitational acceleration approaches that caused by earth's mass?
• Which phenomenon causes deflected paths in fiber optics?
• Which outcome occurs when operating a femtosecond laser?
• Which outcome occurs when a piezoelectric crystal coupled with a capacitor experiences cyclical mechanical stress, near resonance?
• Which risk increases when ground conductivity decreases substantially along a buried high-voltage power transmission line?
• Which outcome occurs when extremely dense object warps spacetime?