Which outcome limits CMOS transistor miniaturization using extreme ultraviolet?

💡 Explanation

Quantum tunneling becomes significant as gate oxide thickness decreases because electrons can tunnel through the insulating layer via Quantum tunneling, therefore off-state leakage increases, rather than electromigration or hot carrier injection, which are reliability concerns under high current or voltage stress.

• Which outcome destabilizes a solid electrolyte in a battery?
• Which outcome increases when a packed-bed chemical reactor temperature approaches adiabatic runaway?
• Which consequence arises when a Carnot heat engine's working fluid cannot completely condense during the isothermal heat rejection?
• Which outcome occurs when a microwave oven's waveguide is deformed?
• Which outcome occurs when sudden cooling shocks tempered glass?
• Which outcome occurs when the mantle's adiabatic upwelling cools?