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Which outcome limits gate oxide scaling in advanced MOSFET transistors when considering electron tunneling?

A)Increased gate leakage current
B)Reduced channel mobility
C)Threshold voltage instability
D)Enhanced hot carrier injection

💡 Explanation

When gate oxide thickness decreases, direct tunneling probability increases because quantum mechanical effects allow electrons to pass through the potential barrier, increasing gate leakage. Therefore increased gate leakage results, rather than mobility reduction, instability, or injection which are caused by distinct mechanisms and conditions.

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