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Which outcome occurs on a silicon wafer when multi-layer anti-reflective coatings experience thickness variations?

A)Destructive interference creates visible iridescence
B)Increased light transmission reduces feature resolution
C)Phase shifts cause higher electron temperature
D)Material stress causes layer delamination failures

💡 Explanation

Destructive interference causes iridescence because varying coating thicknesses change path lengths of reflected light, causing interference patterns, resulting in visible colors, rather than other spectral effects because coherent light is necessary.

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