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Which outcome results when gate oxide tunneling degrades transistor reliability?

A)Increased subthreshold leakage current
B)Improved carrier mobility saturation
C)Reduced gate capacitance variance
D)Enhanced channel length modulation

💡 Explanation

Increased subthreshold leakage occurs because electron Quantum Tunneling breaches the gate oxide's insulating layer, therefore increasing current flow when the transistor is supposed to be off, rather than improving carrier behavior or other gate effects.

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