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Which phenomenon disrupts nanoscale optical lithography using deep ultraviolet lasers?

A)Speckle patterns reduce image contrast
B)Chromatic aberration blurs focus plane
C)Self-focusing leads to filamentation
D)Fresnel diffraction creates proximity artifacts

💡 Explanation

Speckle patterns reduce image contrast because they stem from random interference due to poor temporal coherence of the laser; therefore speckle disrupts fine feature printing rather than blurring from aberrations or diffraction effects at mask edges.

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