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Which risk greatly increases within oscillating MEMS accelerometers due to stiction?

A)Crystal lattice dislocations accumulate quickly
B)Substrate delamination undergoes rapid spalling
C)Surface wear creates thermal runaway
D)Oxidation rapidly corrodes metal surfaces

💡 Explanation

Crystal lattice dislocation accumulation leads to increased stiction noise floor, because atomic planes slip; therefore, the signal degrades and lowers the lower detection limit, rather than surface wear or corrosion dominating.

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