Which risk increases when electron beam lithography resolution declines?

💡 Explanation

Reduced resolution causes imprecise electron beam placement, leading to etching errors because diffraction increases. Therefore, pattern fidelity decreases, rather than changes in current, uniformity, or proximity correction, which relate to beam control itself.

• Which structural change results from dissolving hydrogen gas in palladium crystal lattice at high concentrations?
• Which decay product increases when spent nuclear fuel is submerged?
• Which consequence results when a continuous stirred-tank reactor (CSTR) experiences unexpectedly slow fluid mixing given a constant catalyst input?
• Which consequence results when radio waves interfere destructively?
• Which outcome results from exceeding the Lawson criterion in deuterium-tritium fusion?
• Which outcome occurs within a coaxial cable when signal frequency increases?