Which outcome causes the limited resolution in optical lithography?

💡 Explanation

When light passes through the mask aperture, diffraction causes wavefront divergence hindering imaging of features smaller than the Rayleigh criterion; therefore resolution is limited by this diffraction, rather than by pattern errors, because aberrations affect contrast.

• Which outcome occurs when increasing the frequency factor constant?
• Which mechanism causes increased electrical resistance in polycrystalline silicon microbeams under significant tensile stress?
• Which consequence results when excessive stress fractures induce fatigue?
• Which issue arises when combining incoherent laser beams?
• Which material property causes hysteresis losses in each magnetic cycle of a transformer core?
• Which outcome occurs when elevated temperature alters enzymatic geometry?