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Which phenomenon disrupts microchip lithography when illumination source phase varies?

A)Speckle Formation
B)Resonance Fluctuation
C)Temporal Drifting
D)Quantum Entanglement

💡 Explanation

Speckle formation disrupts lithography because it's caused by self-interference of coherent light with varying phase; therefore it changes the intensity pattern rather than just temporal drifting, because the effects are spatially distributed.

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