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← ScienceWithin silane pyrolysis influencing silicon film deposition, which consequence results when substrate temperature increases?
A)Enhanced surface diffusion enhances film conformity.
B)Silane decomposition favors homogeneous nucleation.✓
C)Gas-phase depletion shifts radical pathways.
D)Lattice defects enable bulk recrystallization later.
💡 Explanation
Increased temperature favors gas-phase decomposition via the Arrhenius equation; therefore, homogeneous nucleation increases, rather than surface reactions dominating, because thermal energy promotes gas dissociation rather than surface adsorption governing the reaction.
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